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Stopper Set
Insulation Ring

Comparing with traditional stopper, our Silicon Nitride stopper has very low thermal expansion rate, therefore it is able to control the flow with good precision.

For poly silicon production, the insulation ring is able to form a tight seal and insulation for the electros, making sure the yield is controlled at high level.

Silicon Nitride Stopper

Technical Specifications

Physical

Resistivity: 10^14 Ω · cm

Thermal 

Thermal conductivity: 26 W/(m · K)

Specific heat: 0.65 J/(g · K)

​Thermal shock resistance: 800 °C (1,472 °F)

Max operation temperature: 1,150 °C (2,102° F)

Coefficient of linear expansion: 3.4 x 10-6 m/°C

Mechanical

Bending strength: 750 MPa

Young’s modulus: 280 GPa

Fracture toughness: 6.5 MPa · m1/2

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